JPH0637521Y2 - マイクロ波励起による紫外線発生装置 - Google Patents

マイクロ波励起による紫外線発生装置

Info

Publication number
JPH0637521Y2
JPH0637521Y2 JP1988130728U JP13072888U JPH0637521Y2 JP H0637521 Y2 JPH0637521 Y2 JP H0637521Y2 JP 1988130728 U JP1988130728 U JP 1988130728U JP 13072888 U JP13072888 U JP 13072888U JP H0637521 Y2 JPH0637521 Y2 JP H0637521Y2
Authority
JP
Japan
Prior art keywords
microwave
ultraviolet
reflector
cavity
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1988130728U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0250906U (en]
Inventor
納 上崎
Original Assignee
高橋 柾弘
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 高橋 柾弘 filed Critical 高橋 柾弘
Priority to JP1988130728U priority Critical patent/JPH0637521Y2/ja
Priority to US07/416,309 priority patent/US4990789A/en
Publication of JPH0250906U publication Critical patent/JPH0250906U/ja
Application granted granted Critical
Publication of JPH0637521Y2 publication Critical patent/JPH0637521Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
    • H05B41/14—Circuit arrangements
    • H05B41/24—Circuit arrangements in which the lamp is fed by high frequency AC, or with separate oscillator frequency
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/64—Heating using microwaves

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP1988130728U 1988-05-10 1988-10-05 マイクロ波励起による紫外線発生装置 Expired - Fee Related JPH0637521Y2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1988130728U JPH0637521Y2 (ja) 1988-10-05 1988-10-05 マイクロ波励起による紫外線発生装置
US07/416,309 US4990789A (en) 1988-05-10 1989-10-03 Ultra violet rays generator by means of microwave excitation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988130728U JPH0637521Y2 (ja) 1988-10-05 1988-10-05 マイクロ波励起による紫外線発生装置

Publications (2)

Publication Number Publication Date
JPH0250906U JPH0250906U (en]) 1990-04-10
JPH0637521Y2 true JPH0637521Y2 (ja) 1994-09-28

Family

ID=15041212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988130728U Expired - Fee Related JPH0637521Y2 (ja) 1988-05-10 1988-10-05 マイクロ波励起による紫外線発生装置

Country Status (2)

Country Link
US (1) US4990789A (en])
JP (1) JPH0637521Y2 (en])

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US5471109A (en) * 1992-12-31 1995-11-28 Fusion Systems Corporation Method and apparatus for preventing reverse flow in air or gas cooled lamps
US5373217A (en) * 1993-03-24 1994-12-13 Osram Sylvania Inc. Method and circuit for enhancing stability during dimming of electrodeless hid lamp
US5959306A (en) * 1996-02-08 1999-09-28 Bright Solutions, Inc. Portable light source and system for use in leak detection
EP0983522A4 (en) * 1996-11-05 2000-03-08 Corrosion Consultants Inc ULTRAVIOLET LIGHTING LIGHTING AND VIEWING SYSTEM AND METHOD FOR DETECTING LEAKS OF FLUORESCENT DYE
US6133577A (en) * 1997-02-04 2000-10-17 Advanced Energy Systems, Inc. Method and apparatus for producing extreme ultra-violet light for use in photolithography
US6065203A (en) * 1998-04-03 2000-05-23 Advanced Energy Systems, Inc. Method of manufacturing very small diameter deep passages
US6194733B1 (en) 1998-04-03 2001-02-27 Advanced Energy Systems, Inc. Method and apparatus for adjustably supporting a light source for use in photolithography
US6105885A (en) 1998-04-03 2000-08-22 Advanced Energy Systems, Inc. Fluid nozzle system and method in an emitted energy system for photolithography
US6180952B1 (en) 1998-04-03 2001-01-30 Advanced Energy Systems, Inc. Holder assembly system and method in an emitted energy system for photolithography
US6118130A (en) * 1998-11-18 2000-09-12 Fusion Uv Systems, Inc. Extendable focal length lamp
WO2000070651A1 (en) * 1999-05-12 2000-11-23 Fusion Lighting, Inc. High brightness microwave lamp
AU7489500A (en) 1999-09-20 2001-04-24 Nordson Corporation Apparatus and method for generating ultraviolet radiation
US6419749B1 (en) 1999-11-05 2002-07-16 Fusion Uv Systems, Inc. Apparatus for UV curing a coating on a filament or the like and method of manufacturing
CN1224074C (zh) 2000-04-07 2005-10-19 诺德森公司 带有灯体冷却系统的微波激励的紫外线灯系统
US6663297B1 (en) 2000-07-27 2003-12-16 Quantum Group Inc. Photon welding optical fiber with ultra violet (UV) and visible source
US6323601B1 (en) 2000-09-11 2001-11-27 Nordson Corporation Reflector for an ultraviolet lamp system
US6559460B1 (en) 2000-10-31 2003-05-06 Nordson Corporation Ultraviolet lamp system and methods
JP3846203B2 (ja) * 2001-02-23 2006-11-15 松下電工株式会社 無電極放電灯点灯装置
US6505948B2 (en) * 2001-03-28 2003-01-14 Fusion Uv Systems, Inc. Method of modifying the spectral distribution of high-intensity ultraviolet lamps
GB2375603B (en) * 2001-05-17 2005-08-10 Jenact Ltd Control system for microwave powered ultraviolet light sources
KR100414091B1 (ko) * 2001-07-20 2004-01-07 엘지전자 주식회사 마이크로파를 이용한 조명시스템
KR100414090B1 (ko) * 2001-07-20 2004-01-07 엘지전자 주식회사 마이크로파를 이용한 조명시스템
GB0120993D0 (en) * 2001-08-30 2001-10-24 Quay Technologies Pulsed UV light source
US6779350B2 (en) * 2002-03-21 2004-08-24 Ritchie Enginerring Company, Inc. Compressor head, internal discriminator, external discriminator, manifold design for refrigerant recovery apparatus and vacuum sensor
US6832491B2 (en) * 2002-03-21 2004-12-21 Ritchie Engineering Company, Inc. Compressor head, internal discriminator, external discriminator, manifold design for refrigerant recovery apparatus
US6831419B1 (en) * 2003-06-02 2004-12-14 Nordson Corporation Exhaust system for a microwave excited ultraviolet lamp
JP4694803B2 (ja) * 2003-08-28 2011-06-08 芝浦メカトロニクス株式会社 紫外光照射装置及び照射方法、基板製造装置及び基板製造方法
US20050126200A1 (en) * 2003-12-05 2005-06-16 Ajit Ramachandran Single valve manifold
KR20050089516A (ko) * 2004-03-05 2005-09-08 학교법인 성균관대학 전자석이 구비된 반도체 식각용 중성빔 소오스
US20060228242A1 (en) * 2005-04-11 2006-10-12 Ritchie Engineering Company, Inc. Vacuum pump
US20060228246A1 (en) * 2005-04-11 2006-10-12 Ritchie Engineering Company, Inc. Vacuum pump
US20100194265A1 (en) * 2007-07-09 2010-08-05 Katholieke Universiteit Leuven Light-emitting materials for electroluminescent devices
US8179046B2 (en) * 2008-05-20 2012-05-15 Nordson Corporation Ultraviolet lamp system with cooling air filter
JP2011175748A (ja) * 2010-02-23 2011-09-08 Seiko Epson Corp 光源装置および投射型表示装置
US8269190B2 (en) 2010-09-10 2012-09-18 Severn Trent Water Purification, Inc. Method and system for achieving optimal UV water disinfection
CN104141914B (zh) * 2013-05-09 2016-09-07 深圳市海洋王照明工程有限公司 蓬顶灯
DE102013011066A1 (de) * 2013-07-03 2015-01-08 Oerlikon Trading Ag, Trübbach Wärme-Lichttrennung für eine UV-Strahlungsquelle
TWI785519B (zh) * 2021-03-05 2022-12-01 台灣積體電路製造股份有限公司 微波產生器、紫外光源、與基板處理方法

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US3136890A (en) * 1961-07-12 1964-06-09 Harry C Wain Broad spectrum prospector
US3911318A (en) * 1972-03-29 1975-10-07 Fusion Systems Corp Method and apparatus for generating electromagnetic radiation
US3872349A (en) * 1973-03-29 1975-03-18 Fusion Systems Corp Apparatus and method for generating radiation
AT355200B (de) * 1978-01-23 1980-02-25 Espe Pharm Praep Bestrahlungsgeraet zum aushaerten von durch strahlung haertbaren massen
US4359668A (en) * 1979-03-14 1982-11-16 Fusion Systems Corporation Method and apparatus for igniting electrodeless discharge lamp
DE3125267A1 (de) * 1981-06-26 1983-01-13 Patra Patent Treuhand Halogenellipsoidreflektorlampe mit kaltlichtreflektor
US4532427A (en) * 1982-03-29 1985-07-30 Fusion Systems Corp. Method and apparatus for performing deep UV photolithography
JPS61104560A (ja) * 1984-10-25 1986-05-22 Toshiba Corp マイクロ波放電光源装置
US4641033A (en) * 1984-12-19 1987-02-03 Fusion Systems Corporation Apparatus and method preventing radiation induced degradation of optical elements
JPH0426660Y2 (en]) * 1985-08-05 1992-06-26
JPS62127834A (ja) * 1985-11-29 1987-06-10 Canon Inc 照明装置
US4710638A (en) * 1986-02-10 1987-12-01 Fusion Systems Corporation Apparatus for treating coatings
JPH0411330Y2 (en]) * 1986-09-19 1992-03-19
JPH0621167Y2 (ja) * 1987-08-07 1994-06-01 高橋 柾弘 マイクロ波励起による紫外線発生装置

Also Published As

Publication number Publication date
US4990789A (en) 1991-02-05
JPH0250906U (en]) 1990-04-10

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